Argon
Compressed argon gas and liquid argon in a variety of purities and in various modes of supply around the world thanks to our network of storage and transfill facilities.
Semiconductors
We assist you to reach the next node level in your wafer fabrication process
Today’s semiconductor processes face extreme reliability and yield expectations. You need to ensure that the purity of the process and equipment availability is up to your expectations. Air Products is the best partner of choice for global semiconductor manufacturers. We offer a broad portfolio of ultra-high purity carrier gases, equipment, and services to help you achieve the highest standard of consistent and reliable semiconductor manufacturing processes.
Global leading gas supplier for Semiconductors
Our core capabilities of product, equipment, and service include:
- Various supply modes, including onsite generation, bulk supply and microbulk supply
- Ultra high purity carrier gases, including nitrogen, oxygen, hydrogen, helium and argon
- Ultra high purity process gases, rare gases and gas mixtures
- Design, manufacture and installation of all related equipment
- Excellent record of meeting on-time needs
- Industry leader in safety
- Technical expertise
- World-class customer service
Gases
Air Products gases, typically provided in gaseous and liquid form, enable customers in a wide range of industries to improve their environmental performance, product quality, and productivity.
Helium
An inert gas for cryogenic, heat transfer, shielding, leak detection, analytical and lifting applications
Hydrogen
Valued for its reactive and protective properties, and used by many industries such as electronics, foods, glass, chemicals, refining and more can benefit from its unique properties to improve quality, optimize performance and reduce costs.
Nitrogen
Useful as a gas, for its inert properties, and as a liquid for cooling and freezing. Virtually any industry can benefit from its unique properties to improve yields, optimize performance and make operations safer.
Oxygen
In addition to its use as a respiratory gas for healthcare applications, its strong oxidizing properties benefit many industries by improving yields, optimizing performance, lowering costs and reducing carbon footprint compared to other fuels.
Rare Gases
Useful as ion beam sources to clean, cut or weld materials as well as their unique ability to produce bright light, which may be in the form of a laser or a light source. Also used in propulsion engines or in window insulation.
Speciality Gases
UHP gases, process, calibration and ISO 17025 accredited mixtures in a wide range of supply modes.
Xenon Recovery
- Xenon is a high-value material that can be recovered, purified, then reused
- Xenon Recovery is Air Products proprietary/patented technology that was developed to recover xenon from semiconductor fab’s tool exhaust stream
- Concept developed by leveraging Air Products experience in adsorption technologies
- Operation and maintenance at customer site
Ask the Expert
“Can you provide guidance on the proper gas purification system for my semiconductor fabrication site?”
There is no one system that can purify all your process gases at one time. Depending on the gas to be purified, the impurities that have to be removed, the flow rate and the required final purity, there are different types of purifiers available from large back pad systems to small point of use systems. We can assist you in deciding on the correct system for your requirements.
Questions? We've got answers.
Our experts are here to help you. Book a free consultation today!